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发明名称
CHEMICAL MECHANICAL POLISHING SLURRY CONTAINING OXIDE POLISHING RESISTANT
摘要
申请公布号
KR20060099313(A)
申请公布日期
2006.09.19
申请号
KR20050020689
申请日期
2005.03.11
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LIM, JONG HEUN;HONG, CHANG KI
分类号
C09K13/06
主分类号
C09K13/06
代理机构
代理人
主权项
地址
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