SEMICONDUCTOR-MANUFACTURING APPARATUS EQUIPPED WITH COOLING STAGE AND SEMICONDUCTOR-MANUFACTURING METHOD USING SAME,申请号KR20060020977-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	SEMICONDUCTOR-MANUFACTURING APPARATUS EQUIPPED WITH COOLING STAGE AND SEMICONDUCTOR-MANUFACTURING METHOD USING SAME
摘要
申请公布号	KR20060099423(A)	申请公布日期	2006.09.19
申请号	KR20060020977	申请日期	2006.03.06
申请人	ASM JAPAN K.K.	发明人	TAKAYUKI YAMAGISHI;TAKESHI WATANABE
分类号	H01L21/673	主分类号	H01L21/673
代理机构		代理人
主权项
地址

您可能感兴趣的专利

RETRACTABLE BALL POINT PEN

COLUMN-TYPE DISPLAY STAND FOR FLAT PARALLELIPIPEDIC ARTICLES

PREPARATION OF 33HALOGENO BENZONITRILE

ACOUSTIC REPRODUCING SYSTEM

COMPUTER TOMOGRAPHY

MICRO PROBE SECONDARY MASS SPECTROMETER

55*4*DIRYLMETHYL**11PIPERAZINYLALKYL** BENZOIMIDAZOLE DERIVATIVE

CURRENT SUPPLYING CIRCUIT

ELECTRONIC HOUR STRIKING CIRCUIT

ANTIBIOTIC GLOBOMYCIN

DRUM DEVICE FOR COOLING AND SEPARATING CASTING AND FOUNDRY SAND

TOP COAT OF SURFACE OF SILVER

METHOD OF TREATING EXHAUST GAS OF SINTERING MACHINE

BINARY CODING APPARATUS OF INPUT SIGNAL HAVING LEVEL VARIATIONS

METHOD OF OBTAINING DESIRED COLOR ON PHOTOSENSITIVE MEDIUM FROM LIGHT SOURCE

REGULATOR FOR TIMEPIECE MOVEMENT

DIGITAL SIGNAL PROCESSOR

SOLID STATE ANALOGUE DISPLAY WITH REDUCED NUMBER OF CONNECTIONS

TRUE BEARING INDICATOR FOR DIRECTION FINDER