| 摘要 |
A micro-electromechanical system comprises a substrate (S) and at least two micro-elements ( 1, 2 ) of which a first is bistably switchable. The micro-elements ( 1, 2 ) have faces ( 3 a, 4 a) facing one another, which are produced by a structuring method and thereby initially have at least one minimal distance from one another characteristic of the structuring method. The first micro-element ( 1 ) is then switched to the other stable state (B) whereby the distance between the faces ( 3 a, 4 a) facing one another is smaller than the characteristic minimal distance for the structuring method. The micro-electromechanical system can be constructed as an electrostatically actuatable microswitch with improved switchability. Laterally and horizontally operating micro-electromechanical systems with new functionality and current-free closed relays can be implemented.
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