发明名称 Polishing machine
摘要 A polishing machine uses a polishing head having a movable pad to press a polishing tape for polishing beveled and edge parts of a disk-shaped object. A rotary shaft is connected to the polishing head in a direction of contact surface between the polishing tape and the object. A rotary-and-reciprocating motion device rotates the polishing head around the axial line of the rotary shaft and moves it reciprocatingly along its axial line. A moving device undergoes a reciprocating motion perpendicularly to the object surface while supporting the object. When in use, the polishing head is rotated while the pad causes the polishing tape to protrude from it while the object is rotated.
申请公布号 US7108582(B2) 申请公布日期 2006.09.19
申请号 US20050303207 申请日期 2005.12.15
申请人 NIHON MICROCOATING CO., LTD. 发明人 SATO SATORU;TAMURA JUN;WATANABE JUN
分类号 B24B41/04;B24B9/00;B24B9/06;B24B21/00;H01L21/304 主分类号 B24B41/04
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