发明名称 |
Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method |
摘要 |
An exposure apparatus for projecting and transferring a pattern on a master onto a surface of a target exposure object by radiation exposure, including a radiation generating unit for generating radiation having a plurality of different wavelengths, and a wavelength selecting unit for selecting a wavelength of the radiation generated by the radiation generating unit. The wavelength selecting unit acquires information on the pattern on the master, and selects a wavelength on the basis of wavelength information or wavelength distribution information contained in the acquired information.
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申请公布号 |
US7110504(B2) |
申请公布日期 |
2006.09.19 |
申请号 |
US20050132345 |
申请日期 |
2005.05.19 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KASUMI KAZUYUKI |
分类号 |
G03F7/20;H01L21/027;H05G2/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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