Angular velocity sensor

摘要

The present invention provides an angular velocity sensor that can diagnose abnormalities without having on a tuning fork vibrator special abnormality diagnostic signal input electrodes or reference potential ground electrodes to reduce errors in detecting angular velocity. Switches ( 45 ) and ( 48 ) are used to generate drive signals of the same phase at output terminals ( 49 ) and ( 50 ), thereby bending arms ( 2 ) and ( 3 ) in the Z-axis direction of tuning fork vibrator 1. The electric charges generated from tenth electrode ( 22 ) and 12th electrode ( 25 ) formed respectively on arms ( 2 ) and ( 3 ) are amplified respectively at first amplifier ( 62 ) and second amplifier ( 63 ). The outputs of these amplifiers are inputted to differential amplifier ( 64 ), whose output is compared by comparator ( 81 ) with a prescribed value generated by reference value generator ( 82 ). When the output exceeds the prescribed value, comparator ( 81 ) determines an abnormality.