| 摘要 |
A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from th e upper-level incident radiation absorption and detection structure for defini ng an optical resonant cavity (36) there between and a substantially planar low er- level thermal isolation leg structure (20) spaced apart from the middle-leve l radiation reflection structure and electrically coupled to the upper-level incident radiation absorption and detection structure and to an underlying readout circuit. The lower-level thermal isolation leg structure is electrically coupled to the upper-level incident radiation absorption and detection structure through a leg (44) that passes through an aperture (48) within the middle-level radiation reflection structure, the leg also functioning as a structural support member. The lower-level thermal isolatio n leg structure is electrically coupled to the readout circuit through another leg (18) that terminates on an electrical contact (16) disposed on an underlying readout integrated circuit (12), and the middle-level radiation reflection structure is supported by an extension of the leg (18A). It is within the scope of these teachings that the upper-level incident radiation absorption and detection structure includes a stiffening member (50), such a s one disposed frame-like about a periphery of the upper-level incident radiation absorption and detection structure. The resonant optical cavity is defined by a spacing that is a function of a wavelength of the incident radiation, and an adjacently disposed unit cell of an array of unit cells ma y have a resonant optical cavity having a different spacing, thereby providing enhanced sensitivity to a different wavelength.
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