发明名称 |
Thin-film bulk acoustic oscillator and method of manufacturing same |
摘要 |
A thin-film bulk acoustic oscillator comprises: a base; a barrier layer disposed on the base; a lower electrode disposed on the barrier layer; a piezoelectric thin film disposed on the lower electrode; and an upper electrode disposed on the piezoelectric thin film. The piezoelectric thin film includes a columnar crystal that extends in the direction intersecting the film surface. The top surface of the piezoelectric thin film is flattened by polishing so as to have a root mean square roughness of 2 nm or smaller.
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申请公布号 |
US7109637(B2) |
申请公布日期 |
2006.09.19 |
申请号 |
US20040814120 |
申请日期 |
2004.04.01 |
申请人 |
TDK CORPORATION |
发明人 |
KOMURO EIJU;SAITOU HISATOSHI;YAMASHITA YOSHINARI |
分类号 |
H01L41/04;H01L41/09;H01L41/08;H01L41/18;H01L41/187;H01L41/22;H03H3/02;H03H9/02;H03H9/15;H03H9/17 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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