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发明名称
Method of manufacturing a semiconductor device
摘要
申请公布号
KR100622639(B1)
申请公布日期
2006.09.18
申请号
KR20030080042
申请日期
2003.11.13
申请人
发明人
分类号
H01L21/28;H01L21/768;H01L31/0328
主分类号
H01L21/28
代理机构
代理人
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