发明名称 |
SEPARABLE MODULATOR |
摘要 |
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
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申请公布号 |
KR20060098362(A) |
申请公布日期 |
2006.09.18 |
申请号 |
KR20067003335 |
申请日期 |
2006.02.17 |
申请人 |
IDC, LLC |
发明人 |
SAMPSELL JEFFREY B.;MILES MARK W.;CHUI CLARENCE;KOTHARI MANISH |
分类号 |
G02B26/00;G01J3/26;G02B6/12;G02B26/02;G02B26/08;G02F1/137;G02F1/21;G09G3/34 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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