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发明名称
MANIPULATOR FÜR EINEN TESTKOPF MIT AKTIVER NACHGIEBIGKEIT
摘要
申请公布号
AT338952(T)
申请公布日期
2006.09.15
申请号
AT20010971267T
申请日期
2001.09.20
申请人
INTEST CORPORATION
发明人
NY, NIL, O.;AKOUKA, HENRI, M.;HOLT, ALYN, R.
分类号
G01M99/00;G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R1/073;B23Q1/48
主分类号
G01M99/00
代理机构
代理人
主权项
地址
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