| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of preventing noise reduction and accurately performing measurement, by making only the reflected light by a light source for detecting displacement of a cantilever come into a light receiving element without disabling the measurement or reducing the operability. SOLUTION: The scanning probe microscope measures shape information on a sample surface or physical information on the sample by bringing a probe close to or into contact with the sample surface. The scanning probe microscope comprises, in a casing 8 having light blocking effect, the cantilever 2 having the sharpened probe at its free end; a sample moving mechanism 4 for relatively moving the cantilever 2 and the sample 3; and a displacement detecting mechanism for detecting the displacement of the free end of the cantilever 2 by interaction acting between the tip of the probe and the sample 3 using the light source 5 for detection and the light receiving element 1. A polarizer 10 is disposed in an opening of the casing 8, and a second polarizer 9 is disposed on an optical path between the polarizer 10 and light receiving element 1 so that the polarizer 10 is orthogonal to the polarizing angle. COPYRIGHT: (C)2006,JPO&NCIPI
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