| 摘要 |
PROBLEM TO BE SOLVED: To provide a table driving device capable of imposing both a radial load and an axial load. SOLUTION: In a lifting device equipped with a lifting unit for lifting and lowering a liftable table and a driving system for driving the lifting unit, the lifting unit is provided with screw shafts (ball screws 4a and 4b and ball screw shaft ends 14a and 14b) extended toward the liftable table, and nuts vertically moving along the screw shafts with the rotation of the screw shafts; the nuts are connected to the liftable table; and the screw shafts are rotatably supported to bearing mechanisms. The driving system is provided with a driving source for generating rotary motion and a motion transmission mechanism for transmitting the rotary motion of the driving source to the lifting unit to rotate the screw shafts; and each bearing mechanism is provided with one deep-groove ball bearing B1 and two angular ball bearings B2. COPYRIGHT: (C)2006,JPO&NCIPI
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