| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal vacuum test device capable of eliminating adverse temperature influence to a specimen panel by preventing temperature distribution of a shroud from becoming large. SOLUTION: Temperature-controllable heater blocks 6a-6d are installed on a part becoming a low temperature in a cooling shroud 4, i.e., a peripheral part of the cooling shroud at a temperature-rising step. Since temperature difference of a central part and the peripheral part is reduced in the cooling shroud by heating the installation place of the heater blocks 6a-6d, the temperature distribution of the cooling shroud 4 can be prevented from becoming large. Thereby, environment in which a peripheral temperature giving thermal influence to the specimen panel 2 is applied such that the temperature distribution of the specimen panel 2 is made uniform can be created. COPYRIGHT: (C)2006,JPO&NCIPI
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