| 摘要 |
PROBLEM TO BE SOLVED: To provide an instrument and method for measuring the humidity in a cavity with which even in the case of wetting the inner part of a pipe passage arranging a humidity sensor or wetting the humidity sensor, the measurement of the humidity of the air in the cavity can be performed. SOLUTION: In a first vacuum gas-exhausting pipe passage 10, a second vacuum gas-exhausting pipe passage 20 having a first valve 21 and a second valve 22, is communicated. In a prescribed range 20C of the second vacuum gas-exhausting pipe passage 20 between the first valve 21 and the second valve 22, the humidity sensor 30 is arranged. In the first valve 21, an ejector 42 is connected through a first atmosphere communicating pipe 40 and the prescribed range 20C of the second vacuum gas-exhausting pipe passage 20 can be communicated with the atmosphere through the second valve 22 and a second atmosphere communicating pipe 50. Even in the case of wetting with bedewing, the prescribed range 20C in the second vacuum gas-exhausting pipe passage 20 or the humidity sensor 30, the air is made to flow into the prescribed range 20C in the second vacuum gas-exhausting pipe passage 20 with the ejector 42, these positions can be dried. COPYRIGHT: (C)2006,JPO&NCIPI
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