| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a volatileβ-ketoiminato complex of a metal, and an electronic device using the complex. <P>SOLUTION: Copperβ-ketoiminato complex can be obtained from aβ-ketoimine, e.g. obtained from 2,4-pentanedione and methylamine, and copper chloride, butyllithium and trimethylvinylsilane. The copperβ-ketoiminato complex may be used as precursors to deposit a metal or a metal-containing film on a substrate under, for example, atomic layer deposition or chemical vapor deposition conditions. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
