发明名称 TRANSISTOR USING PHYSICAL PROPERTY TRANSFORMATION LAYER, ITS PERFORMANCE, AND MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a transistor using a physical property transformation layer, its performance, and a manufacturing method. SOLUTION: The transister comprises an insulating film 42 formed on a substrate, a first conductive layer pattern 44a and a second conductive layer pattern 44b spaced on the insulating film 42, a physical property transformation layer 46 formed on the insulating film 42 between the first conductive layer pattern 44a and the second conductive layer pattern 44b, a high dielectric film 48 stacked on the physical property transformation layer 46, and a gate electrode 50 formed on the high dielectric film 48. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006245589(A) 申请公布日期 2006.09.14
申请号 JP20060056765 申请日期 2006.03.02
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 CHO CHOONG-RAE;YOO IN-KYEONG;CHO SUNG-IL
分类号 H01L29/786;H01L21/28;H01L29/417 主分类号 H01L29/786
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