METHOD AND DEVICE FOR MANUFACTURING LIQUID CRYSTAL ALIGNMENT FILM

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a liquid crystal alignment film that can efficiently perform alignment processing for the alignment film formed on a glass substrate while securing in-surface uniformity. SOLUTION: Laser seed light 2 emitted by an excimer laser emitting laser light of 308 and 351 nm in wavelength or a diode laser 1 emitting laser light of 355 nm in wavelength is made incident on an optical module 3 which makes its intensity distribution uniform to generate laser light 4 deformed into a long-sized profile. The laser light 4 deformed into the long-sized profile is caused to impinge on a total reflecting mirror 5 which varies an angle of irradiation, and then transmitted through a reduction projection or enlargement projection lens 6. An organic film 8 which is applied on a liquid crystal TFT substrate or CF substrate 9 and has a photoreactive group is irradiated with the reduced or enlarged laser light 7 having passed through the reduction projection or enlargement projection lens 6 to form the liquid crystal alignment film on the organic film 8 having the photoreactive group. COPYRIGHT: (C)2006,JPO&NCIPI