| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method capable of inspecting at high speed the quality of an inspection object. SOLUTION: When performing noncontact inspection by fixing a sensor 1 on the upper part of a liquid crystal panel (glass substrate)10 which is the inspection object, and by floating the inspection object 10 by airflow, the distance between the sensor 1 and the liquid crystal panel 10 is measured by laser length measurement by a length measuring part 4, and air is blown out by an air blowout part 11 also from the sensor side based on the result, to thereby control the interval (gap) between the sensor 1 and the liquid crystal panel 10. COPYRIGHT: (C)2006,JPO&NCIPI
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