| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measuring apparatus having high resolution in a depth direction and capable of measuring the surface shape of objects to be measured having relatively large level differences in a short time. SOLUTION: An object light Ls and a reference light Lr emitted from a low-coherent light source 11 are divided into a plurality of object lights Ls1-Ls4 and a plurality of reference lights Lr1-Lr4 by first and second light-wave dividing elements 14A and 14B to provide prescribe differences in optical path length between the reference lights Lr1-Lr4. Then the object lights Ls1-Ls4 and the reference lights Lr1-Lr4 are each combined by a third beam splitter 12C and made incident onto a photo-detector 17. The photo-detector 17 outputs electric signals corresponding to the differences in optical path length of the object lights and the reference lights. COPYRIGHT: (C)2006,JPO&NCIPI
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