| 摘要 |
A method and apparatus for limiting net curvature in a substrate is provided. A layer is formed on one side of a substrate to limit curvature that may be introduced in the substrate by formation of a thermal spreading layer on an opposing side of the substrate. For example, introduction of a diamond layer on a substrate to dissipate thermal energy away from a semiconductor layer may introduce tensile or compressive stress in the substrate and result in undesirable bowing and/or warping of the substrate. To limit this curvature, a curvature limiting layer, e.g. another diamond layer, may be formed on subjacent to the substrate.
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