发明名称 PRODUCTION METHOD OF METAL MASK, AND METAL MASK
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a production method of a metal mask with which positions of openings can be corrected even after a mask sheet is fixed to a frame and the variation in the tension of the mask sheet can be suppressed, and a metal mask. <P>SOLUTION: In the production method of the metal mask, the mask sheet 12 having the plurality of openings and the frame 14 to be mounted with the mask sheet 12 are prepared. (2) The end of the mask sheet 12 is fixed to the frame 14. (3) Whether the openings of the mask sheet 12 exist in desired positions or not is checked. (4) If the positions of the openings are shifted, the mask sheet 12 is shrunk by a means, such as irradiation of the mask sheet 12 with a laser 18, to move the positions of the openings. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006241547(A) 申请公布日期 2006.09.14
申请号 JP20050060183 申请日期 2005.03.04
申请人 KYOCERA CORP 发明人 KANEKO KATSUHIRO
分类号 C23C14/04;B23K26/00;H01L51/50;H05B33/10 主分类号 C23C14/04
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