| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-grid structure for holding specimens of an electron microscope which can reduce the possibility of breakage of a specimen holding film as well as easily discriminable between such as the front and back surfaces of a specimen, and to provide a manufacturing method of the specimens. SOLUTION: This micro-grid structure can suppress the occurrence of breakage extended from a periphery, which may occur due to an impact shock acting on the micro-grid structure 10, when the periphery of a holding film 13 is protected with a supporting frame 11 because the supporting frame for supporting a mesh 12 has a convex-like shape, and protrudes from the surface for mounting specimens 15 of a holding film 13; or due to malfunction occurred by members such as a glass probe for mounting the specimens. COPYRIGHT: (C)2006,JPO&NCIPI
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