| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processing device in which a light emitting state of a plasma near a to-be-processed object is easily found. SOLUTION: A photo detecting part 13 for detecting light emission of the plasma is fit to a to-be-processed object supporting table 12 for holding the to-be-processed object 11, and an optical transmission means 14 for taking the detected emitted light out of the device is fit, and the emitted light taken out of the device by the optical transmission means 14 is divided by a spectroscopy 15, to record in a data recording device 16. COPYRIGHT: (C)2006,JPO&NCIPI
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