| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for storing a substrate in which the substrate having a metal film formed can stably be stored, and a method for manufacturing a coil component. SOLUTION: When a substrate 5 with a coil is stored, water W for storage is put in a container 6 first. Ultrapure water of≥17 MΩcm in specific resistance and≤50μg/l in dissolved oxygen concentration is used as the water W for storage. Then the water W for storage is irradiated with ultraviolet rays to prevent algae from being produced in the water W for storage. The substrate 5 with the coil is dipped in the water W for storage. A lid 10 is fitted onto the container 6 across an O ring 9 to keep the inner side of the container 6 in a hermetical state, and the substrate 5 for the coil is stored in the water W for storage awhile. COPYRIGHT: (C)2006,JPO&NCIPI
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