| 摘要 |
PROBLEM TO BE SOLVED: To provide a new preparation method of a polymer, especially a preparation method of a polymer capable of forming an insulating film with a low dielectric constant which is used for an electronic device and shows little change of dielectric constant over time, a film-forming composition using the same, and the insulating film and the electronic device having the same. SOLUTION: The preparation method of the polymer comprises a step wherein a compound of formula (I): (Y)m-X-(R)n (wherein X shows a basket structure; R is a substituent containing an acetylenic carbon-carbon triple bond or a substituent containing an ethylenic carbon-carbon double bond; Y is a substituent; m is an integer of≥0; and n is an integer of≥1) is polymerized to obtain a polymer A and a step wherein the polymer A is reduced to obtain a polymer B. The film-forming composition contains the polymer. The insulating film and the electronic device are obtained using the same. COPYRIGHT: (C)2006,JPO&NCIPI
|
