| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric substance element, having improved piezoelectric and breakdown voltage characteristics. <P>SOLUTION: The method for manufacturing the piezoelectric substance element is provided with a first process of applying a first sol for forming a piezoelectric substance film on a substrate, where a lower electrode is formed, a second process of applying a second sol for forming the piezoelectric film after conducting the first process at least once, and a third process of heat treating at a predetermined temperature, after the second process. The first and second sols are provided with a composition, capable of forming the piezoelectric substance film, having a perovskite-type crystal structure expressed by general Formula A<SB>x</SB>B<SB>y</SB>O<SB>3</SB>. The content of substance composing an A site of the first sol is larger than that of the second sol. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
