发明名称 POTASSIUM NIOBATE DEPOSITED BODY, MANUFACTURING METHOD THEREFOR, SURFACE ACOUSTIC WAVE ELEMENT, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT AND ELECTRONIC EQUIPMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a potassium niobate deposited body having the thin film of potassium niobate and a manufacturing method therefor. <P>SOLUTION: The potassium niobate deposited body includes an R plane sapphire substrate 11 and a potassium niobate layer 13 or a potassium niobate solid solution layer formed above the R plane sapphire substrate 11. The potassium niobate layer 13 or the potassium niobate solid solution layer is epitaxially grown in (100) orientation in pseudo cubic display, and the (100) plane of the potassium niobate layer 13 or the potassium niobate solid solution layer is inclined to the R plane (1-102) of the R plane sapphire substrate with a [11-20] direction vector as a rotary axis. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006246186(A) 申请公布日期 2006.09.14
申请号 JP20050060915 申请日期 2005.03.04
申请人 SEIKO EPSON CORP 发明人 HIGUCHI AMAMITSU;AOYAMA HIROSHI
分类号 H03H9/25;C01G33/00;C30B29/30;H01L41/187;H03B5/30;H03H9/64 主分类号 H03H9/25
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