| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of changing the spot diameter while preventing the size thereof from being increased. <P>SOLUTION: A laser beam marking device 10 as a laser beam machining apparatus comprises a laser beam source 12 to emit laser beams, a plurality of beam expanders 33a-33c which are capable of increasing the diameter of the laser beams at a predetermined magnification and different in magnification from each other, galvanometer mirrors 25, 26 to change the direction of the laser beams from the beam expanders, and an fθlens 27 to condense the laser beams from the galvanometer mirror 26 and irradiate them on a workpiece. A holding part 31 to hold the beam expanders 33a-33c is capable of changing one beam expander by another having different magnification. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
