| 摘要 |
PROBLEM TO BE SOLVED: To measure runout of cutting edges of rotary tools with accuracy of submicron order in a high-speed rotation range between extremely low-speed rotation and high-speed rotation at 100,000/min or faster. SOLUTION: By arranging a lens B in such a way that a cutting edge of a rotary tool may be matched with a front focus point of the lens B, arranging a dimmer filter at a rear focal point of the lens B, matching a front focal point of a lens C with the rear focal point of the lens B, and arranging an imaging element at a rear focal point of the lens C, Fraunhofer images or shadow diffraction images of the cutting edge are acquired from the imaging element to improve accuracy in calculating the position of the center of a ball of the rotary tool and compute runout. COPYRIGHT: (C)2006,JPO&NCIPI
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