| 摘要 |
PROBLEM TO BE SOLVED: To provide a guide device capable of always stably and smoothly moving a movable body without being influenced by thermal expansion. SOLUTION: This guide device is provided with: a plurality of guide members 6 and 7 extended on a base 2; air bearings each mounted to the guide member and moving along the respective guide members; and the movable body 4 supported and positioned by the air bearings. The air bearing mounted to one of the plurality of guide members is composed of a vertical air bearing 8 for vertically supporting the movable body and horizontal air bearings 10a and 10b for horizontally positioning the movable body; and the air bearings mounted to the other guide members are each composed of only the vertical air bearing for vertically supporting the movable body. COPYRIGHT: (C)2006,JPO&NCIPI
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