| 摘要 |
A capacitor ( 100 ) is disclosed that is formed as part of an integrated circuit (IC) fabrication process. The capacitor ( 100 ) has conductive top and bottom electrodes ( 140, 144 ) and a nonconductive capacitor dielectric ( 142 ). In one example, the dielectric ( 142 ) includes first and second thin dielectric layers ( 112, 114 ) that sandwich a layer of antireflective material ( 118 ). The thin layers ( 112, 114 ) provide the dielectric behavior necessary for the capacitor while the antireflective layer ( 118 ) promotes reduced feature sizes by mitigating reflected standing waves, among other things.
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