发明名称 Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method
摘要 A binder is mixed to alumina powder with a purity of 99.5% or more (step S 11 ), the mixture is granulated (step S 12 ), resultant granule powder is formed with a die (step S 13 ), and a formed compact is sintered in a hot-pressing manner (step S 14 ).
申请公布号 US2006205585(A1) 申请公布日期 2006.09.14
申请号 US20060370662 申请日期 2006.03.08
申请人 NGK INSULATORS, LTD. 发明人 MORI YUTAKA;MATSUDA HIROTO;NOBORI KAZUHIRO
分类号 C04B35/00 主分类号 C04B35/00
代理机构 代理人
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