摘要 |
<p>It is intended to produce a target at low cost by safely adding of an additive that is apt to catch fire in atmospheric air. An additive is added to a main material in low-oxygen ambient atmosphere, and molten primary alloy (13) is obtained. A further main material is added to the molten primary alloy (13) in air atmosphere so as to effect a weight increase, thereby obtaining a secondary alloy. Molten or solid primary alloy (13,18) is stable, so that any fire catching would not occur. As the amount of primary alloy (13,18) is less than the amount of secondary alloy, vacuum vessel (11) for forming of primary atmosphere can be compact.</p> |
申请人 |
ULVAC, INC.;ULVAC MATERIALS, INC.;OTA, ATSUSHI;SUGIURA, ISAO;TANI, NORIAKI;MATSUMOTO, MASAHIRO;KATAGIRI, HIROAKI;MASUDA, TADASHI;ISHIBASHI, SATORU;ITO, TAKAHARU |
发明人 |
OTA, ATSUSHI;SUGIURA, ISAO;TANI, NORIAKI;MATSUMOTO, MASAHIRO;KATAGIRI, HIROAKI;MASUDA, TADASHI;ISHIBASHI, SATORU;ITO, TAKAHARU |