发明名称 PROCESS FOR TARGET PRODUCTION
摘要 <p>It is intended to produce a target at low cost by safely adding of an additive that is apt to catch fire in atmospheric air. An additive is added to a main material in low-oxygen ambient atmosphere, and molten primary alloy (13) is obtained. A further main material is added to the molten primary alloy (13) in air atmosphere so as to effect a weight increase, thereby obtaining a secondary alloy. Molten or solid primary alloy (13,18) is stable, so that any fire catching would not occur. As the amount of primary alloy (13,18) is less than the amount of secondary alloy, vacuum vessel (11) for forming of primary atmosphere can be compact.</p>
申请公布号 WO2006095642(A1) 申请公布日期 2006.09.14
申请号 WO2006JP304048 申请日期 2006.03.03
申请人 ULVAC, INC.;ULVAC MATERIALS, INC.;OTA, ATSUSHI;SUGIURA, ISAO;TANI, NORIAKI;MATSUMOTO, MASAHIRO;KATAGIRI, HIROAKI;MASUDA, TADASHI;ISHIBASHI, SATORU;ITO, TAKAHARU 发明人 OTA, ATSUSHI;SUGIURA, ISAO;TANI, NORIAKI;MATSUMOTO, MASAHIRO;KATAGIRI, HIROAKI;MASUDA, TADASHI;ISHIBASHI, SATORU;ITO, TAKAHARU
分类号 C23C14/34;C22C1/02;H01L21/285 主分类号 C23C14/34
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