| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a single crystal ferroelectric thin film which obtains large strain by a small driving voltage, and also to provide an actuator device using the same and a liquid injection head and liquid injection equipment. <P>SOLUTION: The actuator device comprises a vibration plate formed on one surface side of a substrate 10; and a piezoelectric element 300 consisting of a bottom electrode 60, a piezoelectric layer 70, and a top electrode 80 which are formed on the vibration plate. The vibration plate consists of a silicon oxide film 50 formed on one surface side of the substrate 10, and an orientation control layer 55 which is formed of perovskite or metal oxide having a (100) surface orientation and formed on the silicon oxide film 50. The bottom electrode 60 is formed on the orientation control layer 55 and of at least one kind of metal selected among iridium(Ir), platinum (Pt), palladium (Pd), and gold (Au), and has a (100) surface orientation. The piezoelectric layer 70 is formed on the bottom electrode 60, and consists of a ferroelectric layer formed of a pyramidal quadratic system crystal and having a (100) surface orientation. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
