| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining mechanism capable of safely performing laser beam machining. <P>SOLUTION: Laser beams output from a laser beam source 11 are reflected by a beam splitter 12, condensed by a condensing lens 13, and focused and projected on a machining surface of a workpiece 2. The intensity of the reflected beams generated on the machining surface of the workpiece 2 irradiated with the laser beams is monitored by a reflected beam monitoring unit 15, and the intensity of the heat radiation generated on the machining surface of the workpiece 2 irradiated with the laser beams is monitored by a heat radiation monitoring unit 16. When the intensity of the reflected beams and the intensity of the heat radiation obtained by the monitor are respectively smaller than predetermined values, the output of the laser beams of the laser beam source 11 is dropped or stopped by a control unit 17, or an alarm is given. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
