| 摘要 |
PROBLEM TO BE SOLVED: To provide an analyzing system of a three-dimensional structure capable of achieving the reduction of energy by sharply enhancing energy resolving power and capable of precisely grasping the surface composition of a sample. SOLUTION: The analyzing system of the three-dimensional structure is equipped with an ion gun for irradiating at least a part of the sample with an ion beam, an electron gun for irradiating the sample, which is three-dimensionally processed by the ion beam, with electrons, an X-ray detector for detecting the X rays from the sample irradiated with electrons and a composition analyzer for analyzing the composition of the sample on the basis of the detection result in the X-ray detector. The X-ray detector comprises an energy dispersing type superconductive X-ray detector. COPYRIGHT: (C)2006,JPO&NCIPI
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