ASSESSING MARK FOR MICROLENS

摘要

An assessing mark of microlens array fabricated in a scribe line region includes two vertical line patterns arranged substantially in parallel with each other, and a horizontal line pattern connecting the vertical line patterns. The vertical line patterns and horizontal line pattern define an inner index path. When treated by baking process, the two vertical line patterns are fluidized due to heat and partially merge together from the horizontal line pattern of the assessing mark along the inner index path.