发明名称 |
Compound semiconductor devices and methods of manufacturing the same |
摘要 |
A compound semiconductor device and method of manufacturing the same. The method includes coating a plurality of spherical balls on a substrate and selectively growing a compound semiconductor thin film on the substrate on which the spherical balls are coated. The entire process can be simplified and a high-quality compound semiconductor thin film can be grown in a short amount of time in comparison to an epitaxial lateral overgrowth (ELO) method.
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申请公布号 |
US2006205197(A1) |
申请公布日期 |
2006.09.14 |
申请号 |
US20050202126 |
申请日期 |
2005.08.11 |
申请人 |
POSTECH FOUNDATION |
发明人 |
YI GYU-CHUL;AN SUNG-JIN;KIM YONG-JIN;LEE DONG-KUN |
分类号 |
H01L31/00;C30B25/18;C30B29/38;H01L21/205;H01L21/3205;H01L21/4763;H01L29/739;H01L33/32;H01S5/323 |
主分类号 |
H01L31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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