MICRO NOZZLE, MOUNTING CONSTRUCTION AND MANUFACTURING METHOD OF MICRO NOZZLE

摘要

PROBLEM TO BE SOLVED: To provide a mounting construction of a micro nozzle with good temperature rising performance of fuel oil. SOLUTION: The mounting construction is formed so that a construction in which a heat insulation structure 6 is inserted between a semiconductor substrate 51 with a plurality of through holes 53 for raising temperature of the passing fuel oil and a hold structure 4 for holding the semiconductor substrate 51. This allows intercepting the heat diffused from the semiconductor substrate 51 to the hold structure in temperature rising of the fuel oil, heat therefore becomes easy to transfer to the fuel oil flowing in the through holes 53 and temperature rising time of the fuel oil can be shortened. COPYRIGHT: (C)2006,JPO&NCIPI