| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated substrate production system reducing production failures of laminated substrates. SOLUTION: The substrate W2 is subjected to removal of the impurities and products sticking to the substrate and to the surface of a display element while inert gas is jetted toward the internal surface of the substrate W2, is carried into a chamber 20 of a press by a transfer robot 31 for attracting and holding the outer circumferential parts of the inner and outer surfaces thereof, and is then held on a pressure plate 24a. COPYRIGHT: (C)2006,JPO&NCIPI
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