发明名称 Technique for the growth of planar semi-polar gallium nitride
摘要 A method for growing planar, semi-polar nitride film on a miscut spinel substrate, in which a large area of the planar, semi-polar nitride film is parallel to the substrate's surface. The planar films and substrates are: (1) {10{overscore (11} gallium nitride (GaN) grown on a {100} spinel substrate miscut in specific directions, (2) {10{overscore (13} gallium nitride (GaN) grown on a {110} spinel substrate, (3) {11{overscore (22} gallium nitride (GaN) grown on a {1{overscore (100} sapphire substrate, and (4) {11{overscore (13} gallium nitride (GaN) grown on a {1{overscore (100} sapphire substrate
申请公布号 US2006205199(A1) 申请公布日期 2006.09.14
申请号 US20060372914 申请日期 2006.03.10
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 BAKER TROY J.;HASKELL BENJAMIN A.;FINI PAUL T.;DENBAARS STEVEN P.;SPECK JAMES S.;NAKAMURA SHUJI
分类号 H01L21/28;H01L21/3205;H01L33/00 主分类号 H01L21/28
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