发明名称 Methods of forming self-healing metal-insulator-metal (MIM) structures and related devices
摘要 Methods of forming metal-insulator-metal structures may include providing a first conductive electrode on a substrate, forming a dielectric layer on the first conductive electrode, and forming a second conductive electrode on the dielectric layer so that the dielectric layer is between the first and second conductive electrodes. In addition, a conductive layer may be formed between the dielectric layer and one of the first and second conductive electrodes wherein the conductive layer includes a conductive material that decomposes into a non-conductive material once a threshold temperature has been exceeded. Related structures are also discussed.
申请公布号 US2006205170(A1) 申请公布日期 2006.09.14
申请号 US20060365768 申请日期 2006.03.01
申请人 RINNE GLENN A 发明人 RINNE GLENN A.
分类号 H01L21/20 主分类号 H01L21/20
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