ALUMINA-SINTERED BODY AND ASSOCIATED MANUFACTURING METHOD, AND ELECTROSTATIC CHUCK AND ASSOCIATED MANUFACTURING METHOD

摘要

A binder is mixed to alumina powder with a purity of 99.5% or more (step S11), the mixture is granulated (step S12), resultant granule powder is formed with a die (step S13), and a formed compact is sintered in a hot-pressing manner (step S14).