| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emission semiconductor laser device which emits stable a laser beam by a unimodal lateral mode, and to provide a manufacturing method therefor. SOLUTION: The device includes a lower reflecting mirror 14 consisting of a semiconductor multilayer film, an active layer 18 and an upper reflecting mirror 22 consisting of a semiconductor multilayer film, in this order on a substrate 12. The device includes a compound semiconductor layer 24 extending to the upper reflecting mirror 22, provided with a first opening part 30 for exposing the upper reflecting mirror 22, and a metal film 36 extending on the compound semiconductor layer 24, provided with a second opening part 38 for exposing the upper reflecting mirror 22 inside of the first opening 30. The inside diameter of the first opening part 30 is set larger than that of the second opening part 38. COPYRIGHT: (C)2006,JPO&NCIPI
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