| 摘要 |
PROBLEM TO BE SOLVED: To provide, in lower cost, a heat treatment apparatus for preventing the formation of a part of a process tube heated excessively higher than an equally heated region by surely controlling a temperature in the process tube. SOLUTION: Temperatures of three points including both edges of an equally heated region Eb and the central area of the process tube 11 are detected by thermocouples 17b, 17d and 17c and temperatures of regions Ea, Ec are detected by thermocouples 17a, 17e using profile thermocouples 17 of five-point type thermocouples. A temperature controller 20 controls, in an optimum state, a temperature in the process tube 11 not to allow a temperature in each region Ea, Ec to exceed the temperature of the equally heated region Eb, by covering thermal losses at the deeper area 11a of a furnace and at the entrance 11b of the furnace by individually controlling temperatures of heaters 15a to 15c based on temperature detection results of spike thermocouples 16a to 16c, and by correcting the relevant temperature control based on temperature detection result of thermocouples 17a to 17e forming the profile thermocouple 17. COPYRIGHT: (C)2006,JPO&NCIPI
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