发明名称 Aligning apparatus, exposure apparatus, and device manufacturing method
摘要 An aligning apparatus includes a moving member, a magnetic member arranged vertically above the moving member, a stator unit which is arranged vertically below the moving member and has a plurality of coils, a first magnet unit which is provided to the moving member and generates a force with the magnetic member, and a second magnet unit which is provided to the moving member and generates a force with the stator unit.
申请公布号 US2006202568(A1) 申请公布日期 2006.09.14
申请号 US20060415175 申请日期 2006.05.02
申请人 CANON KABUSHIKI KAISHA 发明人 KORENAGA NOBUSHIGE
分类号 H01L21/68;H02K41/00;G03B27/42;G03F7/20;H01L21/027;H02K9/19;H02K41/03 主分类号 H01L21/68
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