| 申请人 |
CANON ANELVA CORP., FUCHU;ULVAC, INC.;KANTO DENKA KOGYO CO., LTD.;SANYO ELECTRIC CO., LTD.;SONY CORP.;DAIKIN INDUSTRIES, LTD.;TOKYO ELECTRON LTD.;NEC ELECTRONICS CORP., KAWASAKI;HITACHI KOKUSAI ELECTRIC INC.;MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;MITSUBISHI DENKI K.K.;RENESAS TECHNOLOGY CORP. |
发明人 |
SHIBATA, KOJI;TSUJI;MURATA;WANI;KOSANO |
