| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to detect a part mounting load by using a pressurizing mounting head in high accuracy and in a wide range without switching a detectable range using a changeover rod or the like. <P>SOLUTION: The pressurizing attaching head 1 is used to hold a part by a nozzle 19 attached to a shaft 18, and to pressurize and mount it at the specified position on a substrate. In this case, a small-load pressurization detector 17a including a load cell for small load, and a large-load pressurization detector 17b including a load cell for large load, are coaxially arranged in series on the shaft 18. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
