| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mask adapter with which a small-sized mask is used in place of a normal-sized mask. <P>SOLUTION: In the mask adapter 2, which is put on a mask holding device to hold a rectangular shaped mask, and which holds the small mask 4 with a rectangular shape smaller than that of the previously described mask, the mask adapter 2 is equipped with: first and second mask supporting portions 2a which support respective marginal portions of mutually opposing two edges of the small mask 4; and connecting portions 2b which extend so as to intersect the marginal portions of the two edges and connect the first and second mask supporting portions. In the connecting portions the shapes or the properties thereof are set so as to make self weight distortion of the small mask held with the first and second mask supporting portions nearly coincide with that of the portion, corresponding to the small mask, of the mask held with the mask holding device. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
